製品紹介
IPACK-3000
| Inspectionable FOSB (7 types) | КТ3004 / KT3004A4 / KT3005A/ KT3005A2 / |
|---|---|
| MW300GT / GSW300V2 / SB300 | |
| Check items (First inspection) | FOSB Filter Status, Door Latch Alignment, |
| Door Open/Close, Slot Status (Wafer Presence/ empty, tilted), | |
| Flange presence | |
| (Second inspection) | Label Status, Desiccant presence |
| Power & Weight | AC 220 V 2P/3L, 180kg |
| Dimension(mm) | 1950(W) X 1150(D) X 1050(H) |
Inspection Items
Filter Status : The status of the filter installation.
Door Latch Align Status : The align status of the door latch.
Door Open/Close : The status of the door
Slot Status : Slot status (wafer presence/absence, empty, tilted)
Flange Status : Flange status (presence/absence)
Label Status : Label presence and position.
Desiccant Status : Desiccant status (presence/absence)
Other 全体を見る